Abstract: “This work presents a lancet type residual stress measurement test structure which comprises of a pair of bent beams along with cantilevers as driving bars for the rotational pointer structure. The residual stress causes the bent beams to deflect each other, thereby magnifying the pointer deflection. The pointer deflection direction indicates the type of stress (compressive or tensile), with the displacement being independent of Young`s modulus and film thickness. Finite element modeling also used to analyze the structure and is compared with experimental results of electroplated Au structures.”

Keywords: MEMS, residual sess, test structure, FEM analysis