Abstract: “A multi-frequency megasonic system (360/470 kHz) with thickness mode transducers was developed to remove the nano-dimensional and sub-micron particles more effectively from various surfaces and the results obtained are compared with the conventional megasonic system operating with only single frequency. The multi-frequency transducers are piezoelectric transducers operating in thickness mode at different operating frequencies. To assess cleaning ability, the maximum cleaning potential tests were performed and almost 30% cleaning improvement was achieved as compared to 470 kHz and almost 4% improvement was achieved as compared to 360 kHz megasonic system operating with thickness mode transducers for the parts tested. Uniformity of the multi-frequency megasonic cleaning system was measured using ppbTM probe. The results revealed that the cavitation activity was more uniform throughout the entire cleaning system even at the edges and corners of the system employing multi-frequency. The un”

Keywords: multiple megasonic frequency, megasonic sweeping, thickness mode transducers, cavitation intensity, particle removal, nano, sub-micron