Abstract: “Acoustic sensors based on MEMS technology is an emerging area of research. Harmonic analysis of these devices is seen to be deliberated recently. The response of a microstructure when subjected to acoustic waves depends upon its geometric properties as well as its material properties; therefore it is important to understand these properties at this level, generally referred to as Meso scale properties. This paper presents the design and modeling of MEMS acoustic sensor optimized for detecting direction of sound at particular frequency range related to small arms fire. Design and FEM modeling is carried out using gold based process design rules. The sensor is modeled with a structural layer of gold with 4.8 μm thickness. The sensor plates’ deflection amplitude varies when the applied pressure and angle of incidence is changed. Moreover, the stresses induced in the sensor, corresponding to the gunshot fire are analyzed to ascertain the fatigue effects.”

Keywords: Acoustic Sensor, MEMS, PTM, FEM, Yield Strength .