Abstract: “This study investigates the cleaning performance of high intensity megasonic frequencies operating in thickness mode transducers on removal of nano-dimensional and sub-micron particles from ceramic components. The effect of various megasonic frequencies such as 280 kHz, 360 kHz and 470 kHz on 3rd stage cleaning and final cleaning was studied for low temperature co-fired ceramic components. The multiple extractions study was carried out for various frequencies to measure the surface cleanliness, maximum cleaning potential and also to see the erosion propensity. Based on multiple extraction study the design of experiments was formed to develop the best cleaning process i.e higher cleaning efficiency and lower standard deviation. The result indicates that 3rd stage cleaning with 280 kHz followed by 470 kHz as final cleaning and 280 kHz followed by 360 kHz final cleaning provides significantly higher particle removal hence higher cleaning efficiency and lower standard deviation as compared”

Keywords: megasonic sweeping, thickness mode transducers, cavitation intensity, particle removal, laser particle counting, nano, submicron