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Proceedings of
8th International Conference On Advances in Computing, Electronics and Electrical Technology CEET 2018
"MODELING AND SIMULATION OF INDUCTIVELY COUPLED PLASMA (ICP)"
AMEL BELKEBIR
MOHAMMED SALAH AGGOUNE
DOI
10.15224/978-1-63248-144-3-08
Pages
6 - 10
Authors
2
ISBN
978-1-63248-144-3
Abstract: “The purpose of this paper is to present a simplified model of inductively coupled plasma (ICP). The study of the effect of parameters such as current and number of turns in the coil is simulated using Comsol Multiphysics 3.5 by applying the fluid dynamic models that are generally appropriate for the investigation of inductively coupled plasmas.”
Keywords: Thermal Plasmas, Inductively Coupled Plasma (ICP ), Electron Continuity Equation, Argon.