INFLUENCE OF SPUTTERING POWER ON SURFACE TOPOGRAPHY, MICROSTRUCTURE AND MECHANICAL PROPERTIES OF ALUMINUM THIN FILMS
Published In: 8TH INTERNATIONAL CONFERENCE ON ADVANCES IN CIVIL, STRUCTURAL AND MECHANICAL ENGINEERING
Author(s): E.T. AKINLABI , F.M. MWEMA , O.P. OLADIJO
Abstract: The article reports on the influence of sputtering power on surface topography, microstructure and mechanical properties of aluminum thin films sputtered on mild steel substrates. The Al thin films were deposited on mild steel substrate at varying RF power of 150 W, 250 W, 300 W, and 350 W and at a constant substrate temperature of 90 Degree. The films were characterized by optical surface profiler (OSP), field emission scanning electron microscopy (FESEM) and nanoindentation. The highest average and root mean square roughness values were obtained at 250 W while the lowest at 350 W. The highest and smallest Rt values were obtained at 150 W and 350 W respectively. The lowest and highest Rp values were determined at 350 W and 250 W respectively. The lowest hardness and modulus were obtained at 250 W while the highest values were determined on films sputtered at 150 W. The FESEM micrographs revealed that at 150 W the structure consisted of very fine and interconnected oxides and porosity
- Publication Date: 24-Apr-2019
- DOI: 10.15224/978-1-63248-170-2-02
- Views: 0
- Downloads: 0
COMPLEMENTARY INVESTIGATION OF SEM AND AFM ON THE MORPHOLOGY OF SPUTTERED ALUMINUM THIN FILMS
Published In: 8TH INTERNATIONAL CONFERENCE ON ADVANCES IN CIVIL, STRUCTURAL AND MECHANICAL ENGINEERING
Author(s): E.T. AKINLABI , F.M. MWEMA , O.P. OLADIJO
Abstract: This article reports on the evolution of surface characteristics with the temperature for aluminum thin films sputtered on mild steel substrates. The films were sputtered at a constant sputtering power of 200 W and at different temperatures of the substrate; 40 degree celsius, 60 degree celsius, 80 degree celsius and 100 degree celsius. Surface microstructures were observed using a field emission scanning electron microscope (FESEM) and the results complemented by the atomic force microscope (AFM) observations. It was shown that FESEM features such as porosity, clusters and morphology can be revealed via the AFM imaging. Further analyses using AFM were then used to describe the morphology and evolution of the films at different substrate temperatures. The surface features were further related to the nanoindentation properties of the films
- Publication Date: 24-Apr-2019
- DOI: 10.15224/978-1-63248-170-2-03
- Views: 0
- Downloads: 0