Abstract: This paper addresses the topic of robust routing and scheduling for parallel systems that suffer from operation interruptions and unreliable resources. The proposed approach uses a partially controllable extension of timed Petri nets as a model of the deterministic and stochastic behaviours. The mean job durations are first evaluated. Then a mean timed reachability graph is proposed to encode the timing aspects and Dijkstra algorithm is used to solve the routing and scheduling problems related to operation and resource failure rates.

• Publication Date: 15-Mar-2020
• DOI: 10.15224/978-1-63248-184-9-04
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Abstract: So far, the diameter of a Si wafer has been increased to reduce the manufacturing cost of semiconductor chips. However, it is considered that this makes it difficult to form uniform thickness thin films on the entire surface of the wafer by a conventional film forming method. Therefore, we have proposed an oxidation method using chemical solution that can form a film just by immersing it in a chemical solution. In this study, HfO2, a high-k material with a high dielectric constant, was formed on a Si substrate by chemical solution oxidation, and its electrical properties were compared with those of a thermal oxidation method. As a result, the MOS structure was successfully fabricated by oxidation method using chemical solution. However, this method has a problem of improving interface characteristics.

• Publication Date: 15-Mar-2020
• DOI: 10.15224/978-1-63248-184-9-05
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