HIGH PERFORMANCE GATE-STACK FABRICATION PROCESS OF GE-MOS STRUCTURE FOR FUTURE ELECTRONIC DEVICES
Published In: 8TH INTERNATIONAL CONFERENCE ON ADVANCES IN COMPUTING, ELECTRONICS AND ELECTRICAL TECHNOLOGY
Author(s): HARUKA FUJIWARA , HIROSHI YAMADA , MITARO NAMIKI , TOMO UENO , YOSHITAKA IWAZAKI
Abstract: Si has been widely used as primary semiconductor materials for electronic device fabrication. Due to the limitation of its electrical properties such as electron and hole mobilities, however, Ge would be one of the candidates for future electronic device materials because of its higher mobilities of both carriers. However, since GeO2 which composed of Ge-O chemical bonds is known to have water solubility and it reacts with Ge substrates at high temperature, it is well known that GeO desorption occurs at GeO2/Ge interface during higher temperature annealing, as well as during the course of higher temperature oxidation process itself. In this research, we attempted to improve interface characteristics by depositing Hf on the GeO2/Ge structure and applying heat treatment (PMA: Post Metallization Annealing). As a result, it is clearly shown that the decrease of Dit value by the PMA, and the leakage current was reduced and insulating property was improved by applying PMA. We consider that a
- Publication Date: 04-Feb-2018
- DOI: 10.15224/978-1-63248-144-3-10
- Views: 0
- Downloads: 0
INTERACTIVE VISUALIZATION OF TEMPLATE GRAPH FOR DAILY CLINICAL NOTES*
Published In: 6TH INTERNATIONAL CONFEROMPUTING, COMMUNICATION AND INFORMATION TECHNOLOGY
Author(s): H. SOEJIMA , N. NAKASHIMA , N. ONIMURA , S. HIROKAWA , T. YAMASHITA
Abstract: Clinical notes in medical institutions are essential not only for information sharing among medical staff but also\ for analysis to improve medical activities. Especially, the record of free description is important for grasping the situation of the patients. However, manually recording has the problem of input labor and fluctuation of expression by the person who records. In order to solve this problem and enable statistical analysis and mechanical analysis, templates are expected. This paper proposes an interactive support system for defining medical record template for each disease by extracting feature words corresponding to the disease from medical records using machine learning. We constructed an interactive system that displays the context of those characteristic words as a directed graph. A pull-down template can be generated from this graph. We developed a system to generate such graphs interactively for 123,736 free description clinical records of a hospital and examined its
- Publication Date: 29-Apr-2018
- DOI: 10.15224/978-1-63248-144-3-11
- Views: 0
- Downloads: 0